 |
| Concept |
|
| |
Semicon Services
Ltd |
| |
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A new low cost 5 station
Physical Vapour Deposition (PVD) + RF Etch
tool for the backside coating (Sputtering)
, in vacuum, of precious metals onto substrates
in the manufacture of semiconductor wafers. |
| |
|
|
 |
| Prototype |
|
| |
Semicon Services
Ltd |
| |
|
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Completed prototype. |
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Vacuum: 1.5 x 10-7 torr |
|
 |
| Prototype |
| 200mm
Ultra Clean Wafer Sorter (LOCSS) |
|
|
| |
WED Ltd |
| |
Ultra clean (Class 0.1
@ 0.1µm) using a special laminar flow
diffuser. |
| |
|
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Modular sub assembly as
part of the fully automated Logicentre below.
The unit weighing 200kg slides in through
the rear of the machine on PTFE runners and
is accessed only for service. |
|
 |
| Prototype |
| 200mm
Ultra Clean Wafer Sorter |
|
|
| |
WED Ltd |
| |
SCARA arm
with additional 'yaw' axis and tilt (Stewart)
platform |
| |
|
| |
|
|
 |
| Concept |
| Logistical
Centre for Stocking & Sorting Semiconductor
SMIF Pods and Wafers. (LOCSS) |
|
|
| |
ACR GmbH |
| |
. |
| |
The
wafer sorter component was designed as a modular
unit to automatically sort wafers between
four SMIF (standard mechanical interface)
pods |
| |
|
|
 |
| Prototype |
| Logistical
Centre for Stocking & Sorting Semiconductor
SMIF Pods and Wafers. (LOCSS) |
|
|
| |
ACR GmbH |
| |
|
| |
Completed prototype, assembled. |
| |
|
|
 |
| Concept |
|
| |
Handy Hammocks
Ltd |
| |
|
| |
|
| |
|
|
 |
| Concept |
| Sheet
Metal Design -Bespoke Utility Box |
|
|
| Production |
Semicon Services
Ltd |
| |
|
| |
(Fully dimensioned flat
pattern drawings) |
| |
|
|
 |
| Concept |
| Sheet
Metal Design -Bespoke Utility Box |
|
|
| Production |
Semicon Services
Ltd |
| |
. |
| |
(Fully dimensioned flat
pattern drawings) |
| |
|
|
 |
| Concept |
| Sheet
Metal Design - Machinery Cladding +
Doors |
|
|
| |
Semicon Services
Ltd |
| |
|
| |
|
| |
|
|
 |
| Concept |
| Precision
Engineering Design |
|
|
| Production |
Semicon Services
Ltd |
| |
|
| |
|
| |
|
|
 |
| Concept |
|
| Production |
Semicon Services
Ltd |
| |
|
| |
|
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|
|
 |
| Research |
|
| Report |
University
of Plymouth & DERA |
| |
|
| |
Contract for the University
of Plymouth and DERA to research and provide
and working report to find the availability
of special purpose robotics for a very 'particular'
task. |
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|
